Deposition Room
Photolithography Room
Equipment List
- DC / RF Magnetron Sputtering System
- Plasma Surface Treatment System
- Rapid Thermal Annealing (RTA) System
- Atomic Layer Deposition (ALD) System
- Probe Station
- Mask Aligner
- Wet station
- Semi-Automatic Spin Coater
- Semi-Automatic Spin Developer
- Fume Hood
- Ultrasonic Cleaner
- Hot Plate
- Deionized (DI) Water Generation System
- Laboratory Oven
Language